Monolithic waveguide/MEMS switch
US7155083B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2006 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Jun 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12159
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.