High resolution atom probe
US7157702B2 · kind B2 · utility
6Cited by
1References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 26, 2004 |
| Grant date | Jan 2, 2007 |
| Priority date | — |
| Expiry date | May 26, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/244
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A three dimensional atom probe comprising a sharp specimen (10) coupled to a mounting means (12) where emission of charged particles is caused by application of a potential to the specimen tip (10) such that charged particles are influenced by filtering electrodes (206, 204) before impingement on a detection screen (202).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.