Interlock apparatus and method for supplying gas to a semiconductor manufacturing device
US7158864B2 · kind B2 · utility
0Cited by
2References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 15, 2003 |
| Grant date | Jan 2, 2007 |
| Priority date | — |
| Expiry date | Jan 17, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas supplying apparatus for a semiconductor manufacturing device has an interlock apparatus that includes at least one solenoid valve that controls the gas supply from a gas source to the semiconductor manufacturing device, a main controller configured to ouput a control signal for the semiconductor manufacturing device and a driver signal, a driver configured to apply a driving voltage to the at least one solenoid valve in response to the driver signal, and an interlocker configured to sense the open/shut state of the solenoid valves and configured to transmit an interlock signal to the main controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.