Combustion-chamber pressure sensor having a metallic diaphragm containing a piezoresistive, thin metallic layer

US7159448B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Thomas Moelkner · Stuttgart, DE
• Holger Scholzen · Stuttgart, DE
• Joerg Gebers · Hemmingen, DE
• Ralf Kaiser · Erbenheim, DE
• Carsten Kaschube · Leverkusen, DE
• Christian Roesser · Bornsteiner Straße, DE
• Lothar Baumann · Wernau, DE
• Hans-Peter Didra · Tübingen, DE
• Roger Frehoff · Gerlingen, DE
• Markus Fissler · Tamm, DE
• Markus Ledermann · Asperg, DE
• Benjamin Thiel · Stuttgart, DE

Key dates

• Filing date: Jul 22, 2004
• Grant date: Jan 9, 2007
• Expiry date: Jul 22, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L23/18
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor for measuring the pressure in a space acted upon by high pressure. The signals detected by the pressure sensor are supplied to evaluation electronics. A sensor diaphragm is accommodated on the end of the pressure sensor pointing towards the space acted upon by high pressure. The sensor diaphragm takes the form of a steel diaphragm, to whose back side a thin, metallic layer accommodating piezoresistive measuring elements is applied. The thin, metallic layer is contacted by transmission elements and connected to the evaluation electronics.