DLC layer system and method for producing said layer system
US7160616B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2000 |
| Grant date | Jan 9, 2007 |
| Priority date | — |
| Expiry date | Dec 27, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition layer to be arranged on the adhesion layer and a covering layer of diamond-like carbon, wherein the adhesion layer comprises at least one element of the group of elements that contains the elements of the fourth, fifth and sixth subgroup of the periodic table and silicon, the transition layer comprises carbon and at least one element of the aforesaid groups and covering layer consists essentially of diamond-like carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF according to VDI 382l, Sheet 4. The process used for the production of this layer system is such at the initial introduction of the substrate into a vacuum chamber and pumping to produce a vacuum of at least 10−4 mbar, preferably 10−5 mbar, is at first followed by the cleaning of the substrate surface to remove any adhering impurities and then by the plasma-supported deposition of the adhesi…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.