Modifying the electro-mechanical behavior of devices
US7161094B2 · kind B2 · utility
42Cited by
237References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2006 |
| Grant date | Jan 9, 2007 |
| Priority date | — |
| Expiry date | May 18, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/0038
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.