Piezoelectric resonator, piezoelectric filter, and communication apparatus
US7161447B2 · kind B2 · utility
7Cited by
9References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2003 |
| Grant date | Jan 9, 2007 |
| Priority date | — |
| Expiry date | Oct 20, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/568
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.