Pad constructions for chemical mechanical planarization applications
US7163444B2 · kind B2 · utility
1Cited by
20References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2003 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Dec 23, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D11/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention is directed to an abrasive article comprising a fixed abrasive layer and a subpad. The fixed abrasive element is co-extensive with the subpad. The subpad comprises a resilient element. The resilient element has a Shore A hardness of no greater than 60 as measured using ASTM-2240.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.