Apparatus for generating planar plasma using concentric coils and ferromagnetic cores
US7163602B2 · kind B2 · utility
2Cited by
7References
1Claims
0Family size
Inventor
Key dates
| Filing date | Mar 7, 2003 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Jul 20, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma source using a combination of concentric coils and ferromagnetic cores drives a radio frequency magnetic flux with controlled radial magnitude variation through a window into a reduced pressure process chamber, to provide improved plasma generation efficiency and ease of process uniformity adjustment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.