Apparatus for synthesis of layers, coatings or films
US7163608B2 · kind B2 · utility
24Cited by
36References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 1, 2004 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Sep 1, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Systems and methods are described for the synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.