Method for making dense crack free thin films

US7163713B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Craig P. Jacobson · Lafayette, US
• Steven J. Visco · Berkeley, US
• Lutgard C. De Jonghe · Lafayette, US

Key dates

• Filing date: Jun 3, 2002
• Grant date: Jan 16, 2007
• Expiry date: Apr 27, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

The process described herein provides a simple and cost effective method for making crack free, high density thin ceramic film. The steps involve depositing a layer of a ceramic material on a porous or dense substrate. The deposited layer is compacted and then the resultant laminate is sintered to achieve a higher density than would have been possible without the pre-firing compaction step.