Process for depositing finely dispersed organic-inorganic films and articles made therefrom
US7163749B2 · kind B2 · utility
3Cited by
25References
11Claims
0Family size
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Key dates
| Filing date | Dec 20, 2002 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Dec 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A single hybrid organic-inorganic film. The film includes both an organic component, and an inorganic component. The organic component and inorganic component are well interspersed within the film. The film may be incorporated into a multilayer structure including a substrate. A method of forming a hybrid organic-inorganic film. The method includes generating a plasma stream with an expanding thermal plasma generator. The method also includes providing a first reactant and at least one second reactant into the plasma stream extending to a substrate, and forming the hybrid organic-inorganic film on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.