Microwave plasma nozzle with enhanced plume stability and heating efficiency
US7164095B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 7, 2004 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Jul 7, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/463
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Systems and methods for generating relatively cool microwave plasma. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.