Optical displacement sensor

US7164479B2 · kind B2 · utility

Assignee

• Sinvent AS · NO

Inventors

• Ib-Rune Johansen · Oslo, NO
• Britta Fismen · Oslo, NO
• Henrik Rogne · Oslo, NO
• Dag Torstein Wang · Oslo, NO
• Berit Sundby Avset · Oslo, NO
• Alain Ferber · Haslum, NO
• Ralph W. Bernstein · Sandefjord, NO

Key dates

• Filing date: Oct 2, 2002
• Grant date: Jan 16, 2007
• Expiry date: Jul 9, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0079
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This invention relates to an optical displacement sensor element, e.g. for use in a pressure sensor or a microphone, comprising two essentially flat surfaces being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry-Perot interferometer. Both of said surfaces are at least partially reflective, and in that said first surface is provided with at least one optical detector, and one of surfaces being provided on an at least partially transparent material.