Halftone type phase shift mask blank and halftone type phase shift mask
US7166392B2 · kind B2 · utility
6Cited by
2References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2003 |
| Grant date | Jan 23, 2007 |
| Priority date | — |
| Expiry date | Aug 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/84
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A halftone type phase shift mask having a semitranslucent film pattern and a shielding film pattern provided on a transparent substrate in this order is constituted in such a manner that each of the reflectances of the transparent substrate, the semitranslucent film pattern and the shielding film pattern for an inspecting light represents a difference which can detect the semitranslucent film pattern and the shielding film pattern based on a reflected light generated when the inspecting light is irradiated on the mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.