Patent · US Expired

Media isolated electrostatically actuated valve

US7168675B2 · kind B2 · utility

14Cited by
31References
35Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 2004
Grant dateJan 30, 2007
Priority date
Expiry dateSep 2, 2025

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF16K31/02
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

A valve structure having a top part, a flexible media conveyance, such as a tube, a diaphragm and a bottom part with a support for the tube. The top surface of the diaphragm and the bottom surface of the top part may have electrodes attached. When there is no electric potential applied across the electrodes, the diaphragm may rest on and close the passageway in the flexible tube for effectively preventing a fluid flow. When an electrical potential is applied to the electrodes, the diaphragm may be pulled up off from the tube thereby opening or partially opening the passageway in the tube for a media flow or pressure transfer. Partial opening may be for modulation purposes. There may be a tension mechanism attached to the diaphragm. A controller may apply an electrical potential to the electrodes for at least partially opening or closing the valve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.