Aqueous dispersion, process for its production and use

US7169322B2 · kind B2 · utility

Assignee

• Degussa AG · DE

Inventors

• Frank Menzel · Oakland, US
• Wolfgang Lortz · Wächtersbach, DE
• Helmut Mangold · Rodenbach, DE

Key dates

• Filing date: Feb 21, 2002
• Grant date: Jan 30, 2007
• Expiry date: Aug 6, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/2993
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

Aqueous dispersion containing a silicon-aluminum mixed oxide powder, the powder containing 0.1 to 99.9 wt. % Al2O3 and Si—O—Al-bonds. The dispersion can be produced using dispersing and/or grinding devices which a achieve an energy input of at least 200 KJ/m3. The dispersion can be used for the chemical-mechanical polishing of semiconductor substrates.