Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal
US7169532B2 · kind B2 · utility
2Cited by
2References
12Claims
0Family size
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Key dates
| Filing date | Dec 29, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Dec 29, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/269
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A chemically amplified positive photoresist composition for thick film that is used for forming a thick-film photoresist layer with a film thickness of 10 to 150 μm on top of a support, comprising (A) a compound that generates acid on irradiation with active light or radiation, (B) a resin that displays increased alkali solubility under the action of acid, and (C) an alkali-soluble resin, wherein the component (B) comprises a resin formed from a copolymer containing a structural unit (b1) with a specific structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.