Semiconductor photodetector for detecting light having a wavelength in the ultraviolet blue ranges
US7170044B2 · kind B2 · utility
2Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Aug 9, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/953
Abstract
Provided is a photodetector in which a transparent nonconductive material having an interface charge and a trapped charge is deposited on a semiconductor surface so as to form a depletion region on the surface of the semiconductor, and the depletion region is employed as an optical detecting region, thereby not only improving detection with respect to light having a wavelength of ultraviolet and blue ranges but also filtering light having a wavelength of visible and infrared ranges, and in which a fabricating process thereof is compatible with a universal silicon CMOS process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.