Microelectromechanical system
US7170140B2 · kind B2 · utility
12Cited by
3References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2005 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Aug 6, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Microelectromechanical system (MEMS) comprising: The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8). On the other hand, since the movements of the active part (5) are limited by the bumper elements (27, 37, 27′, 37′), it can be guaranteed thanks to the invention that the fastener or fasteners (21, 21′) will not be stretched beyond their elasticity range, thus avoiding their irreversible deformation and/or their rupture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.