System and method for providing high brightness illumination
US7170542B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Dec 22, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70383
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination system includes a plurality of solid state light emitters and a scanner operative to sequentially receive light from the plurality of solid state light emitters and to provide a time-multiplexed light output. The solid state light emitters are each operated in pulse mode to increase their brightness relative to the light output of similar emitters operating in continuous mode. The time multiplexed light output is a generally continuous output having a brightness that is greater than the brightness of the output of similar emitters operating in continuous mode. The time multiplexed light output is useful in photolithography and machine vision applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.