Adaptive Sem edge recognition algorithm
US7171047B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2002 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Feb 15, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A computer-implemented method is disclosed for recognizing edges in a digital image having a plurality of pixels with gray-scale values defining features. The method includes recognizing edges of the features by cearting a new image in which pixels in the new image corresponding to pixels in the gray-scale image that have a brightness value meeting a predetermined threshold are assigned a first binary value to represent edge regions, while remaining pixels in the new image are assigned a second value to represent both background and internal areas of the features. Area recognition is then performed to distinguish internal feature areas from background areas. The method further includes detecting edge lines from the edge regions that separate features from background and internal feature areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.