Stamper for producing optical recording medium, optical recording medium, and methods of producing the same
US7171676B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2005 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Mar 25, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B9/10
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method of producing a stamper, an optical recording medium produced by molding using the stamper, and a method of producing the same, wherein a base member having a mirror polished main surface and comprising silicon or glass is formed with a resist film; the resist film is exposed by a focused electron beam, an ultraviolet ray laser, etc. and developed so as to form a resist film of a pattern corresponding to relief shapes; the mirror surface of the base member is processed to relief shapes (projecting regions and recessed regions) by dry etching etc. using the obtained resist film as a mask so as to obtain a stamper; the obtained stamper is used for injection molding to form a medium substrate; and an optical recording multilayer film and a protective layer are formed to thereby produce an optical recording medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.