Image noise removing method in FIB/SEM complex apparatus
US7173261B2 · kind B2 · utility
4Cited by
2References
4Claims
0Family size
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Key dates
| Filing date | Feb 16, 2005 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Feb 16, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an image noise prevention method in a composite system of a scanning electron microscope (SEM) and a focused ion beam apparatus (FIB), noise generated during a blanking period of the FIB is prevented from entering an image generated by the SEM by adjustment of scanning cycles of the FIB and the SEM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.