Metal heater for in situ heating and crystallization of ferroelectric polymer memory film
US7173842B2 · kind B2 · utility
6Cited by
6References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Jul 8, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An embodiment of the invention provides an on-chip heating system to both initially anneal and revive cycle-fatigued polymer ferroelectric materials utilized in memory devices. By heating the polymer ferroelectric material above its Curie temperature, the polymer ferroelectric material can crystallize as it cools. As such, the ferroelectric properties of the polymer are enhanced and/or restored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.