Multiplex illuminator and device reader for microcantilever array
US7177018B2 · kind B2 · utility
5Cited by
8References
43Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 10, 2003 |
| Grant date | Feb 13, 2007 |
| Priority date | — |
| Expiry date | Jan 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device reader having a multiplex illuminator, the illuminator, and methods for reading deflection of a large number of microcantilevers are provided. The illuminator includes a micro-optical subassembly for illuminating cantilevers (illuminator) that uses a plurality of VCSELs for generating an array of electromagnetic beams, and focuses the beams on the cantilevers. Deflection of the cantilevers causes a change in angle of the beams reflected from the cantilevers, which is recorded by a plurality of position sensitive devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.