MEMS-based actuator devices using electrets
US7177505B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 4, 2004 |
| Grant date | Feb 13, 2007 |
| Priority date | — |
| Expiry date | Apr 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Electrets are used in a variety of MEMS-based actuator devices. The electret is able to store electrical charge for a long time with negligible charge leakage. Therefore, when an electret is incorporated into a MEMS device that requires actuation, the device can be initially biased to any desired actuation state for a long period of time without the use of external bias voltages. Such a MEMS-based device may include a MEMS-based actuator having at least a first deflectable member and at least a second member. The first deflectable member and the second member are provided with a floating electrode and a second electrode. A charge on the first floating electrode is selected so as to position the first deflectable member at a desired separation distance from the second member. The device may be used to align an optical component or to change the electrical characteristics of an electrical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.