Pressure measuring device for vacuum systems
US7178402B2 · kind B2 · utility
3Cited by
9References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2005 |
| Grant date | Feb 20, 2007 |
| Priority date | — |
| Expiry date | Apr 27, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/553
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
A pressure-measuring device is configured for use in vacuum systems, which are used for surface coating or modification of objects and/or substrates in an inner receptacle inside a processing chamber. Elastic elements or portions are fabricated in the inner receptacle. The pressure-measuring device includes distance-measuring elements designed to measure the deformation of the elastic elements of the inner receptacle. The deformation measurements are related to the pressure in the inner receptacle. The pressure-measuring device provides a continuous and secure determination of the pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.