Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
US7180145B2 · kind B2 · utility
52Cited by
12References
49Claims
0Family size
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Key dates
| Filing date | Dec 15, 2003 |
| Grant date | Feb 20, 2007 |
| Priority date | — |
| Expiry date | Dec 15, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P1/127
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.