Thermal flow sensor having streamlined packaging
US7181963B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2004 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | Jun 30, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second side of the first substrate abuts the first side of the second substrate. The third substrate is connected to the second substrate such that the second side of the second substrate abuts the first side of the third substrate. The first, second and third substrate form a multi-layer body structure having at least one edge extending between a first side of the first substrate and the second side of the third substrate. The second substrate has a groove formed therein so as to form a conduit bounded by the second substrate and the second side of the first substrate and the first side of the third substrate. The conduit has an inlet opening and an outlet opening that are formed in the at least one edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.