Moisture-protected pressure sensor
US7181974B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2004 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | Jun 9, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes: a measuring cell having a base plate and a measuring membrane connected along its edge with the base plate, and means for generating an electrical quantity dependent on deformation of the measuring membrane; a circuit for registering the electrical quantity; and a capsule having a capsule body and a sealing element, with which the capsule is hermetically sealed along a joint. The capsule encloses the circuit, in order to protect such from influences of moisture; and the joint of the capsule is mechanically decoupled from the base plate. The mechanical decoupling of the joint means, for example, that at least the axial support of the pressure measuring cell in a housing is not allowed to be transferred through the joint. Despite arranging of the capsule on the base plate, pressure-related and temperature-related distortions of the base plate are not permitted to have any effects on the joint of the capsule.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.