Apparatus and method for measuring thermal conductivity
US7182510B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Apr 4, 2005 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | May 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for measuring and mapping thermal conductivity and thermal diffusivity at micrometer scale resolution. The apparatus and method utilize a mode-locked femtosecond pulsed laser in a pump-probe configuration to analyze time-domain thermoreflectance of a specimen to evaluate its thermal conductivity in micro-scale, so that, if desired, an image of thermal conductivity distribution of micro-scale regions may be obtained therefrom. A multi-layer, complete three-dimensional model that takes into account the entire three-dimensional heat flow in cylindrical coordinates enables micro-scale measurements to be made at an accuracy of about 90% of well-accepted values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.