Piezoelectric/electrostrictive device
US7183694B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2005 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | Nov 17, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2048
Abstract
A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.