Liquid crystal cell that resists degradation from exposure to radiation
US7184109B2 · kind B2 · utility
3Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2003 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | Jan 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1333
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the invention involve UV resistant liquid crystal cells. One embodiment of the invention is to increase the volume of the liquid crystal material that is stored inside the cell. For example, trenches may be used to provide reservoirs that hold the additional liquid crystal material. The inventive cell can be used as a SLM in photolithographic imaging systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.