Optical unit, exposure unit and optical devices
US7184227B2 · kind B2 · utility
2Cited by
6References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 2006 |
| Grant date | Feb 27, 2007 |
| Priority date | — |
| Expiry date | Apr 6, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In an optical unit having a holding structure which brings a junk ring or the like into contact with an optical surface of a lens, the optical surface suffers from a serious elastic deformation leading to deterioration of optical performance. Upon holding the lens, therefore, a face other than the optical surface is provided on the lens so that the lens is held by applying a force to the face from element holding members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.