Wafer cleaning brush
US7185384B2 · kind B2 · utility
9Cited by
9References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2005 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Dec 20, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B1/34
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A semiconductor wafer scrubber has a brush with a nubless outer surface for cleaning the surfaces of a semiconductor wafer. The nubless brush has a body and rotates around a central axis as it contacts the wafer surface. The brush has a central section with an outer diameter less than the diameter of the end sections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.