MEMS magnetic device and method
US7185541B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 2, 2006 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Feb 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V3/081
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device and method of manufacturing comprises a magnetic sensor attached to a frame; at least one magnet adjacent to the magnetic sensor; a proof mass attached to the magnet; a cantilever beam attached to the proof mass; and a rod attached to the cantilever beam and the frame, wherein the magnet is adapted to rotate about a longitudinal axis of the rod. The proof mass comprises a portion of a SOI wafer. An acceleration of the frame causes the magnet to move relative to the frame and the magnetic sensor. An acceleration of the frame causes the connecting member to bend. The motion of the magnet causes a change in a magnetic field at a position of the magnetic sensor, wherein the change in the magnetic field is detected by the magnetic sensor, and wherein a sensitivity of detection of the acceleration of the device is approximately 0.0001 g.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.