Systems and methods for measuring belt tension
US7185546B2 · kind B2 · utility
4Cited by
5References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 14, 2004 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Aug 10, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02827
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for measuring belt tension in a semiconductor processing system include measuring a natural sound or an acceleration of the belt in the semiconductor processing system; digitizing the natural sound or the acceleration; determining the frequency and characterizing the belt tension as a function of the frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.