Piezoelectric element, ink jet recording head and method for manufacturing piezoelectric element
US7187024B2 · kind B2 · utility
5Cited by
12References
6Claims
0Family size
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Key dates
| Filing date | Sep 16, 2003 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Sep 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
In a piezoelectric element having a piezoelectric film sandwiched between a lower electrode and an upper electrode, the lower electrode and/or the upper electrode and the piezoelectric film comprise perovskite oxide and a contact interface between the lower electrode and/or the upper electrode and the piezoelectric film does not exist and a region where crystals of the lower electrode and/or the upper electrode and crystals of the piezoelectric film are mixed exists between the lower electrode and/or the upper electrode and the piezoelectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.