Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
US7187100B2 · kind B2 · utility
4Cited by
4References
43Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 20, 2004 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Aug 6, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.