Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
US7187453B2 · kind B2 · utility
64Cited by
17References
92Claims
0Family size
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Key dates
| Filing date | Apr 23, 2004 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Feb 18, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the cavity length of a remote sensing interferometer by locally replicating the state of the remote sensing interferometer by way of a local interferometer. The local interferometer is produced by micro-electromechanical micro machining techniques, thus obtaining a highly accurate and reliable fiber optic sensing at a cost comparable to electronic sensing devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.