Integrated actuator meniscus mirror
US7188964B2 · kind B2 · utility
7Cited by
26References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 8, 2003 |
| Grant date | Mar 13, 2007 |
| Priority date | — |
| Expiry date | Dec 8, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other and a plurality of actuators embedded in the support structure, spaced from and generally parallel to the mirror surface for applying bending moments to the mirror surface for controllably altering the shape of the mirror surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.