Phototool coating
US7189479B2 · kind B2 · utility
8Cited by
21References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2003 |
| Grant date | Mar 13, 2007 |
| Priority date | — |
| Expiry date | Jun 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/48
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A phototool having a fluorinated phosph(on)ate coating and methods of using the phototool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.