Patent · US Expired

Phototool coating

US7189479B2 · kind B2 · utility

8Cited by
21References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 21, 2003
Grant dateMar 13, 2007
Priority date
Expiry dateJun 6, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F1/48
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A phototool having a fluorinated phosph(on)ate coating and methods of using the phototool.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.