Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
US7190387B2 · kind B2 · utility
28Cited by
18References
25Claims
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Key dates
| Filing date | Sep 11, 2003 |
| Grant date | Mar 13, 2007 |
| Priority date | — |
| Expiry date | Dec 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B3/0043
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.