Optically addressed MEMS
US7190509B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2001 |
| Grant date | Mar 13, 2007 |
| Priority date | — |
| Expiry date | Jan 29, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optically controlled micro-electromechanical systems (MEMS) is disclosed. In one embodiment, a MEMS device may include a rotatable mirror having an optical sensor that is in electrical communication with the rotatable mirror via an associated electrode. Electrical potential may be supplied to an appropriately configured optical sensor so that a variable range of voltages may be supplied to the rotatable mirror. In operation, an optical control beam may be directed onto the optical sensor where it may be sampled to determine its optical characteristics (e.g., optical wavelength, light intensity, position, polarization, duty cycle, etc.) The optical sensor may then supply voltage to the rotatable mirror based on the determined optical characteristics of the optical control beam, causing the rotatable mirror to rotate about one or more axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.