Integrated actuator meniscus mirror without reaction mass
US7192145B2 · kind B2 · utility
13Cited by
33References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 22, 2004 |
| Grant date | Mar 20, 2007 |
| Priority date | — |
| Expiry date | Sep 22, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.