Differential interferometric light modulator and image display device
US7193766B2 · kind B2 · utility
10Cited by
20References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 28, 2006 |
| Grant date | Mar 20, 2007 |
| Priority date | — |
| Expiry date | Mar 28, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light modulator incorporates a polarization sensitive prism and a novel MEMS ribbon device to impart a relative phase shift to polarization components of an incident light beam. A linear array of phase shifting elements in the MEMS device creates a linear image which is scanned to form a two dimensional scene. Alternatively the deflection of each cantilever in a linear array of atomic force microscope cantilevers may be measured simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.