Apparatus and method for determining the minimum zone for an array of features with a true position tolerance
US7194387B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2005 |
| Grant date | Mar 20, 2007 |
| Priority date | — |
| Expiry date | Sep 30, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2111/08
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for determining the minimum zone for an array of features with a true position tolerance. In one embodiment, a target function is defined according to a deviation value of each of at least two features from an array of features having a maximum deviation between an actual position and a nominal position. Once defined, the target function is minimized to determine a rotation parameter, a horizontal translation parameter and a vertical translation parameter that provide a minimum target function value as a minimum of the maximum deviation for the array of features. In one embodiment, an inspection report may be generated for the array of features, including at least the minimum, maximum deviation value, as well as the rotation parameter, the horizontal translation parameter and the vertical translation parameter that provide the minimum target function value. Other embodiments are described and claimed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.