Acceleration sensor having resonators with reduced height
US7194906B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2004 |
| Grant date | Mar 27, 2007 |
| Priority date | — |
| Expiry date | Jul 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/097
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including first and second resonators and attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane N1 in response to the acceleration, the central bending plane N1 being positioned at a central portion of the base plate with respect to the application direction of acceleration. Electrodes are disposed on main surfaces of the resonators, the main surfaces being substantially perpendicular to the application direction of acceleration. The height H1 of the resonators in a direction that is substantially perpendicular to the a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.