Electromechanical resonator and method for fabricating such a resonator
US7196451B2 · kind B2 · utility
1Cited by
4References
14Claims
0Family size
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Key dates
| Filing date | Jul 21, 2004 |
| Grant date | Mar 27, 2007 |
| Priority date | — |
| Expiry date | Aug 9, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02511
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.